Title:
Vapor deposition method and apparatus
United States Patent 2971862
Inventors:
Baer, Charles A.
Bugbee, Wallace F.
Candidus, Edward S.
Clough, Philip J.
Publication Date:
02/14/1961
Other Classes:
118/504, 118/718, 118/719, 427/250, 427/296
International Classes:
C23C14/20; C23C14/56; C23C14/20; C23C14/56