United States Patent 2956218
Inventors:
Alois, Kleinle
Friedrich, Weiss Rudolf
Publication Date:
10/11/1960
Assignee:
INT STANDARD ELECTRIC CORP
Other Classes:
257/E21.074, 257/E21.070, 252/62.30S
International Classes:
H01L21/10; H01L21/108; H01L21/02