Title:
Vaporization method of producing thin layers of semiconducting compounds
United States Patent 2938816
US Patent References:
Process of making photoconductive compounds
- - 2759861


Inventors:
Karl-georg, Gunther
Publication Date:
05/31/1960
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Assignee:
SIEMENS AG
Primary Class:
438/509
Other Classes:
117/952, 257/E21.108, 117/955, 118/715, 148/DIG.065, 117/954, 148/DIG.049, 257/E21.097, 427/250, 117/953, 252/501.100, 438/971, 117/84, 148/DIG.158, 148/DIG.169, 423/406, 423/299
International Classes:
C23C14/00; C23C16/00; H01B1/00; H01L21/203; H01L21/205; H01L21/28; H01L29/207; H01L21/02; H01L29/02
Foreign References:
IT497924B