Methods of manufacturing thin films of refractory dielectric materials
United States Patent 2932588

Inventors:
Josef, Frank Kurt
Publication Date:
04/12/1960
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Assignee:
ENGLISH ELECTRIC VALVE CO LTD
Primary Class:
Other Classes:
219/121.120, 118/723E, 219/121.150, 118/723EB, 219/50, 29/825, 427/598, 219/121.350, 75/10.130, 164/DIG.004
International Classes:
H01B3/02
US Patent References:
2771568Utilizing electron energy for physically and chemically changing members
Foreign References:
GB754102A