LIST OF REFERENCE LETTERS AND NUMERALS FOR THE DRAWINGS

[0048] BA baking area

[0049] C process chamber

[0050] F Filter

[0051] M mass analyzer

[0052] MFC 1 - 3 mass flow controllers MFC

[0053] P 1 , P 2 pressure deflectors

[0054] R recorder

[0055] RM pressure reducing means

[0056] RP vacuum pump

[0057] S 1 , S 2 hydrogen sensors

[0058] SV sampling valves

[0059] V 1 -V 11 valve

[0060] WVG reactor for generating moisture

[0061] 1 reactor shell

[0062] 2 reactor structural component on the inlet side

[0063] 2 a recess

[0064] 3 reactor structural component on the outlet side

[0065] 3 a recess

[0066] 4 weld

[0067] 5 screw bolt

[0068] 6 interior space

[0069] 7 material gas supply passage

[0070] 8 reflector on the inlet side

[0071] 9 material gas supply joint

[0072] 10 moisture gas outlet passage

[0073] 11 reflector on the outlet side

[0074] 12 moisture gas take-out joint

[0075] 13 platinum coated catalyst layer

[0076] 13 a barrier coat

[0077] 13 b platinum coat

[0078] 14 heat dissipation unit

[0079] 15 heater

[0080] 16 heater pressing plate

[0081] 17 fin base plate

[0082] 18 heat dissipation fins

[0083] 19 through hole for the joint

[0084] 20 notch

[0085] 21 fixing bolt hole

[0086] 22 reflector

[0087] P ₁ -P ₃ thermocouples for measurement of temperature distribution

[0088] P thermocouple for temperature regulation

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0089] The embodiments of the present invention will be described as follows with reference to the drawings, wherein like parts are given the reference numerals.

[0090] Embodiments of the Reduced Pressure Apparatus for Generating and Feeding High Purity Moisture.

[0091] FIG. 1 is a schematic diagram of an embodiment of a reduced pressure-type apparatus for generating and feeding moisture according to the present invention. From three kinds of gases —H ₂ , O ₂ and N ₂ —, one or more gases are chosen by means of V 1 , V 4 and/or V 7 and, with the flow rate controlled by mass flow controllers MFC 1 , MFC 2 and/or MFC 3 , fed into the reactor WVG for generating moisture through valves V 3 , V 6 and/or V 9 . The valves V 2 , V 5 and V 8 are exhaust valves. The details of the reactor WVG for generating moisture is omitted in the drawing because it is shown in FIG. 5, 6 or FIG. 8 that will be described later. The pressure of moisture gas generated in the reactor WVG for generating moisture is measured by a pressure detector P 1 and recorded by a recorder R. The moisture gas is squeezed and reduced in pressure by pressure reducing means RM (in FIG. 1 , an orifice), and has its residual gas measured by hydrogen sensors S 1 , S 2 and is then sent to a process chamber C via a filter F. The quantity of residual hydrogen is also recorded on recorder R.

[0092] The gas is heated to 140° C. in the shaded area BA to prevent the gas from adsorbing to the inside wall of the pipe.

[0093] The moisture gas sent from filter F is sampled by a sampling valve SV and the composition analyzed by a mass analyzer M. The process chamber C is a, for instance, a semiconductor manufacturing apparatus. The gas is drawn by a vacuum pump RP via a valve V 10 and its internal pressure is measured by a pressure gauge P 2 . Unnecessary gas is discharged through a valve V 11 .

[0094] The pressure of the material gases flowing in mass flow controllers MFC 1 - 3 is 2 kg/cm ² G. The flow rates are regulated to: N ₂ =1 SLM (liter/minute in a standard state), H ₂ =0.2-1 SLM, and O ₂ =0.5-1 SLM. The internal pressure of the process chamber C is adjusted to 1 Torr by the vacuum pump RP. The orifice used as pressure reducing means RM is 0.6 mm in diameter, and the temperature inside the reactor WVG for generating moisture is set at 350° C.

[0095] FIG. 2 is a graph showing the dependence of the pressure of the reactor for generating moisture on N ₂ gas flow rate. With the vacuum pump RP stopped and the valve V 11 opened, the process chamber C is set at the atmospheric pressure. In this, state, the equipment in FIG. 1 is purged with N ₂ gas alone. When the flow rate of N ₂ gas is increased in the range of 1,000 to 5,000 sccm, the pressure of the reactor will rise linearly in the range of about 900 to 1,900 Torr.

[0096] Since an orifice is installed as pressure reducing means RM, N ₂ gas will stay to increase the pressure of the reactor as the flow rate of N ₂ gas increases, because the flow to the downstream side is regulated by the orifice. Because the pressure is increased with N ₂ gas, it is expected that the other mixed gas will rise in pressure.

[0097] FIG. 3 is a graph showing the dependence of the pressure of the reactor for generating moisture on the flow rate of the mixed gas of H ₂ -O ₂ . Referring to FIG. 1 , the pressure of the process chamber C is set at 1 Torr by operating vacuum pump RP. With the flow rate of H ₂ gas fixed at 1,000 sccm, the flow rate of O ₂ is increased up to 600-1,500 sccm.

[0098] Theoretically, the flow rate of O ₂ gas to react with 1,000 sccm of H ₂ gas is 500 sccm, and the flow rate of generated moisture gas is 1,000 sccm. In practice, however, reaction does not proceed exactly according to the theory. H ₂ gas remains unreacted in a small quantity, and the now rate of moisture gas is slightly smaller than 1,000 sccm. To increase the total pressure of H ₂ -O ₂ , the flow rate of O ₂ , which has no adverse effect, is increased.

[0099] As is evident from FIG. 3 , if the flow rate of O ₂ gas is increased in the range of 600 to 1,500 sccm, the pressure of the reactor rises linearly in the range of about 400 to 740 Torr. It is clear from FIG. 7 that within this pressure range, the ignition point of hydrogen in the reactor is about 560° C., that is, about 210° C. higher than the set temperature of 350° C. in the reactor. Therefore, there is no possibility that hydrogen will ignite in the reactor.

[0100] FIG. 4 is a graph showing the concentration of unreacted H ₂ gas while the flow rate of O ₂ gas changes as in FIG. 3 .

[0101] Even if oxygen is supplied excessively in the moisture generation reaction as shown in FIG. 3 , the quantity of unreacted H ₂ is at most some 0.08 percent. Furthermore, the pressure in the reactor can be maintained at a high level by the pressure reducing means of the present invention. Thus, the ignition point rises, which definitely keeps hydrogen from igniting and ensures that moisture can be produced safely.

[0102] In FIG. 1 , an orifice is used as pressure reducing means RM. As an alternative to that, a valve may be used. In case a valve is used, the flow rate ican be adjusted because the opening of the valve is variable. Thus, the pressure within the reactor for generating moisture can be freely adjusted. Also, any means that has a squeezing mechanism and permits adjustment of pressure or produces pressure loss can be used as pressure reducing means RM, for example, nozzles, Venturi tubes, capillaries, and filters.

[0103] The present invention is not limited to the embodiments just described. It is to be understood that changes and variations may be made without departing from the spirit or scope of the present invention.

[0104] Embodiment of Heat Dissipation Reactor for Generating Moisture

[0105] FIG. 8 is a vertical, sectional view of the reactor shell of the reactor for generating moisture according to the present invention. The construction will be explained briefly. In FIG. 8 , the same reference numbers are used to refer to the same parts as in FIG. 5 .

[0106] The reactor shell 1 comprises a reactor structural component 2 on the inlet side, a recess 2 a, a reactor structural component 3 on the outlet side, a recess 3 a, welds 4 , screw bolts 5 , an interior space 6 , a material gas supply passage 7 , a reflector 8 on the inlet side, a material gas supply joint 9 , a moisture gas outlet passage 10 , a reflector 11 on the outlet side, a moisture gas take-out joint 12 , a platinum coated catalyst layer 13 , a barrier coat 13 a, a platinum coat 13 b, heat dissipation units 14 , a heater 15 and a heater pressing plate 16 .

[0107] FIG. 9 is a top view of the heat dissipation unit 14 , while FIG. 10 is a sectional view taken on line I-I in FIG. 9 . The heat dissipation unit 14 which releases heat has a large number of heat dissipation fins 18 disposed in parallel on the base plate. In the center, there is provided a through hole 19 for the joint. A cut 20 is made that extends from the through hole 19 for the joint to the upper side of fine base plate 17 . At the four corners of the fin base plate 17 , fixing bolt holes 21 are defined that reach reactor structural components 2 , 3 .

[0108] The fin base plate 17 and heat dissipation fins 18 are formed roughly central symmetrically with the through hole 19 for the joint serving as center.

[0109] In FIG. 9 , the fin formation is not perfectly but roughly central symmetrical because the cut 20 is formed in unit 14 . Because of this roughly central symmetry, the heat dissipation of the heat dissipation unit 14 exhibits a central symmetry.

[0110] The unit is so designed that, because of this central symmetry, the temperatures at two different points equally distant from the center and located on the same diametric line are about the same. If the heat dissipation characteristics of the reactor structural components 2 , 3 are made central symmetric, then the temperature distribution in the interior space 6 of FIG. 6 also can be made central symmetric. Moisture generation reaction can be equalized central symmetrically, and thus the temperature in the reactor shell 1 can be prevented from rising locally. In other words, this prevents hydrogen gas and oxygen gas from locally igniting, thus promoting the safety of the reactor for generating moisture and prolonging the life of the reactor.

[0111] FIG. 11 is a side view of the reactor for generating moisture with the heat dissipation unit clamped on the reactor structural component on the inlet side. FIG. 8 is a section taken on line II-II in FIG. 11 .

[0112] To attach the heat dissipation unit 14 ( FIG. 10 ) on the reactor structural component 2 on the inlet side, the material gas supply joint 9 is first inserted through the through hole 19 for the joint, and the fin base plate 17 is closely placed oil the outside wall of the reactor structural component 2 on the inlet side. Then, bolts (not shown) are screwed in and tightened up through the fixing bolt holes 21 .

[0113] To attach the heat dissipation unit 14 on the reactor structural component 3 on the outlet side, the moisture gas take-out point 12 is first inserted through the heater 15 , the heater pressing plate 16 and the through hole 19 for the joint. Then, the fin base plate 17 is placed closely on the heater pressing plate 16 , and bolts are screwed in and tightened up through the fixing boll hole 21 .

[0114] The inventors conducted intensive research in seeking to raise the heat dissipation efficiency of the heat dissipation unit 14 , and found that the heat dissipation can be improved by giving an alumite treatment to the surfaces of the heat dissipation fins 18 .

[0115] Alumite treatment generally means formation of a thin oxide film on aluminum or aluminum alloy. Colored alumite treatment is now possible. Alumite treatment is generally applied to increase the resistance to corrosion and wear. The inventors found that alumite treatment is effective in improving heat dissipation.

[0116] The larger the area of alumite treatment, the greater the heat dissipation of the heat dissipation unit 14 is. Therefore, it is preferable to give an alumite treatment not only to the surfaces of heat dissipation fins 18 but also to the surface of the fin base plate 17 .

[0117] To compare the alumite treated heat dissipation fins and the untreated fins in heat dissipation, the inventors tested three kinds of reactors for generating moisture—one with alumite treated heat dissipation fins, another having fins with no aluminite treatment, and still another without heat dissipation fins.

[0118] FIG. 12 is an end view of the reactor structural component 3 on the outlet side. The reactor structural component 3 on the outlet side was holed at five points. The five holes were drilled at intervals of 1 cm starting with a point 1 cm away from the center. Five thermocouple P ₁ -P ₅ for measurement of temperature distribution were put each 1 mm away from the inside wall to measure the temperature distribution in the radial direction in the interior space 6 on the downstream side. Furthermore, a thermocouple P for temperature regulation to measure the temperature on the downstream side was inserted at a point 3 cm away from the perimeter so as to see how much the temperature was different from the set temperature of the heater 15 . Also, the temperature on the upstream side was measured at the corresponding point on the reactor structural component 2 on the inlet side.

[0119] With H ₂ /O ₂ set at 10/6, or with excessive supply of oxygen, moisture was produced in the oxygen rich state. That is because the oxygen rich state increases the moisture generation efficiency and reduces unreacted material gases. The measurement results are shown in Table 1. Measurements of thermocouple P ₁ are not given in the table. (See Table 1).

[0120] As shown in Table 1, the temperatures on the downstream side almost agree with the set temperatures, which indicate that the heater 15 works according to the regulated and set temperature. The temperature is regulated and set to send generated water vapor to the subsequent facilities. The temperature is set at 300° C. as an example. It is also pointed out that the temperature on the upstream side is lower than that on the downstream side. That indicates that moisture generation hardly takes place in the interior space 6 on the inlet side.

[0121] In the interior space 6 on the outlet side, moisture generation reaction is caused by the platinum catalyst, and therefore, the temperatures are distributed, high around the edge to low in the center. Of the thermocouple P ₂ -P ₅ , thermocouple P ₄ , which 4 cm away from the center, shows the highest temperature. It means that moisture generation or heat is liable to concentrate at that position. That is because the higher the moisture generation is, the larger the self-heating is. It is understood that the unit for the quantity of moisture generation is SLM, or liter/minute in the standard state. 1

[0122] If the upper limit temperature for safe operation of the reactor for generating moisture is 450° C., for example, the quantity of moisture generation where thermocouple P ₄ indicates a temperature below 450° C. can be regarded as the quantity within the safe operation range.

[0123] Therefore, the upper limits of moisture generation for the respective reactors are: the reactor without fins=1 SLM, the reactor with untreated fins=2 SLM, and the reactor with hard alumite-treated fins=2.5 SLM. In other words, provision of fins can increase moisture generation twice, and provision of alumite-treated fins can raise moisture generation 2.5 times.

[0124] The above-mentioned alumite is a hard alumite 20 μm thick. Tests were also conducted with colored alumite (black) 20 μm thick and hard alumites 5-50 μm. They made little difference. That is, readings of thermocouple P ₂ -P ₅ were varied only within several degrees.

[0125] In Table 2, temperatures are measured in the reactor for generating moisture with different thicknesses of alumite and different kinds of alumite with the moisture generation at 2.5 SLM. (See Table 2).

[0126] To summarize, heat dissipation fins are effective in dissipating heat and narrowing the temperature distribution. The moisture generation can be increased about twice.

[0127] It is also noted that alumite treatment on heat dissipation fins can improve heat radiation rate. That is, the temperature can be lowered by some 50° C. in comparison with the fins having no alumite treatment. And the moisture generation can be increased some 2.5 times.

[0128] The results shown in Table 1 are for heat dissipation fins disposed central symmetrically as shown in the drawing. The same results can be obtained with heat dissipation fins disposed roughly axial symmetrically. It is understood that axial symmetry means a concentric arrangement of heat dissipation fins. In the axial symmetrical arrangement, the aforesaid temperature distribution will also be axial symmetrical, which can enhance evenness in the interior space 6 for moisture generation. 2

[0129] The present invention is not limited to the embodiment and examples just described and it is to be understood that changes and variations may be made without departing from the spirit or scope of the present invention.

[0130] Effects of the Invention

[0131] The invention has the following advantageous effects:

[0132] Hydrogen gas can be reduced in pressure by pressure reducing means provided on the downstream side of the reactor for generating moisture before being supplied to the downstream side.

[0133] Ignition of hydrogen can be prevented without fail and, therefore, a safe and stable supply of moisture can be provided because the internal pressure in the reactor can be maintained at a high level.

[0134] The pressure reduction and ignition prevention can be effected by such simple pressure reducing means as an orifice. In case a valve is used as pressure reducing means, it is possible to vary and adjust the opening and also the degree of ignition prevention.

[0135] Unreacted hydrogen contained in moisture gas can be minimized, which further enhances the safety along with the pressure reducing means, because the platinum coated catalyst layer causes hydrogen and oxygen to react into moisture with a high efficiency.

[0136] The temperature in the reactor shell can be lowered by dissipating moisture generation heat through heat dissipation fins, and the quantity of moisture generation can be increased.

[0137] Moisture generated by maintaining the temperature in the reactor shell at a proper level with a heater can be led out as stable water vapor flow to the subsequent facilities.

[0138] The temperature distribution in the reactor can be made centrally or axially symmetrical, preventing the temperature from rising locally and effecting safe and smooth moisture generation in the reactor shell, because heat dissipation fins are disposed roughly centrally or axially symmetrical.

[0139] The temperature in the reactor shell can be further lowered and therefore the moisture generation can be further increased, because the surfaces of heat dissipation fins are alumite-treated to improve heat dissipation.