Title:

Method of forming a film on a semiconductor substrate

Document Type and Number:

United States Patent Application 20040043626

Kind Code:

Abstract:

Provided herein is a method for cleaning CVD reaction chambers with active oxygen species. The active oxygen species may also be mixed with active fluorine species. The active oxygen species are products of a plasma, which may be either generated within the CVD reaction chamber or generated remotely and introduced into the CVD reaction chamber.

Inventors:

Chou San, Nelson Loke (Tokyo, JP)
Kagami, Kenichi (Tokyo, JP)
Satoh, Kiyoshi (Tokyo, JP)

Plaque It!

What is claimed is:

1. A method of forming a carbon-containing film on a semiconductor substrate in a CVD reaction chamber comprising (i) contacting the CVD reaction chamber with an active oxygen species; (ii) transferring a semiconductor substrate into the CVD reaction chamber; (iii) depositing a carbon-containing film on the semiconductor substrate; (iv) transferring the semiconductor substrate out of the CVD reaction chamber; (v) contacting the CVD reaction chamber with an active fluorine species.

2. The method of claim 1 further comprising repeating steps (ii), (iii), (iv), and (v) with additional semiconductor substrates.

3. The method of claim 1 wherein steps (ii) through (iv) are repeated a predetermined number of times before step (v) is performed.

4. The method of claim 1 wherein the active oxygen species is a product of an oxygen plasma generated within the CVD reaction chamber.

5. The method of claim 1 wherein the active oxygen species is a product of an oxygen plasma generated outside the CVD reaction chamber.

6. The method of claim 1 further comprising a separate step of a first contacting of the CVD reaction chamber with an active fluorine species before step (ii).

7. The method of claim 6 wherein the first contacting of the CVD reaction chamber with an active fluorine species occurs after contacting the CVD reaction chamber with an active oxygen species.

8. The method of claim 6 wherein the first contacting of the CVD reaction chamber with an active fluorine species occurs before contacting the CVD reaction chamber with an active oxygen species.

9. The method of claim 6 wherein the active fluorine species is a product of a fluorine plasma generated from a gas comprising a fluorine-containing gas selected from the group consisting of fluorine, fluorocarbon gases, hydrofluorocarbon gases, and gaseous nitrogen fluorides; and optionally, an inert gas selected from the group consisting of He, Ar, Ne, Kr, and Xe.

10. The method of claim 9 wherein the fluorine-containing gas is selected from the group consisting of CF₄, C₂F₆, C₃F₈, and CHF₃.

11. The method of claim 9 wherein the fluorine-containing gas is NF₃.

12. The method of claim 9 wherein the fluorine plasma is generated outside the CVD reaction chamber.

13. The method of claim 1 wherein the carbon-containing film comprises Si, C, O, and H.

14. The method of claim 1 wherein the carbon-containing film comprises Si, C, and H.

15. The method of claim 1 wherein the carbon-containing film comprises Si, C, N, and H.

16. The method of claim 1 wherein the active oxygen species is the product of an oxygen plasma generated from a gas comprising an oxygen-containing gas selected from the group consisting of O₂, CO₂, NO₂, N₂O, H₂O, H₂O₂, and O₃; optionally, an inert gas selected from the group consisting of He, Ar, Ne, Kr, and Xe; and optionally, N₂.

17. The method of claim 16 wherein the gas further comprises NF₃.

18. The method of claim 16 comprising an inert gas.

19. A method of cleaning a CVD reaction chamber used for depositing a carbon-containing film onto a semiconductor substrate comprising contacting the CVD reaction chamber with an active oxygen species.

20. The method of claim 19 wherein the active oxygen species is a product of an oxygen plasma generated within the CVD reaction chamber.

21. The method of claim 19 wherein the active oxygen species is a product of an oxygen plasma generated outside the CVD reaction chamber.

22. The method of claim 19 further comprising a separate step of contacting the CVD reaction chamber with an active fluorine species.

23. The method of claim 22 wherein contacting the CVD reaction chamber with an active fluorine species occurs after contacting the CVD reaction chamber with an active oxygen species.

24. The method of claim 22 wherein contacting the CVD reaction chamber with an active fluorine species occurs before contacting the CVD reaction chamber with an active oxygen species.

25. The method of claim 22 wherein the active fluorine species is a product of a fluorine plasma generated from a gas comprising a fluorine-containing gas selected from the group consisting of fluorine, fluorocarbon gases, hydrofluorocarbon gases, and gaseous nitrogen fluorides; and optionally, an inert gas selected from the group consisting of He, Ar, Ne, Kr, and Xe.

26. The method of claim 25 wherein the fluorine-containing gas is selected from the group consisting of CF₄, C₂F₆, C₃F₈, and CHF₃.

27. The method of claim 25 wherein the fluorine-containing gas is NF₃.

28. The method of claim 25 comprising an inert gas.

29. The method of claim 25 wherein the fluorine plasma is generated outside the CVD reaction chamber.

30. The method of claim 19 wherein the carbon-containing film comprises Si, C, O, and H.

31. The method of claim 19 wherein the carbon-containing film comprises Si, C, and H.

32. The method of claim 19 wherein the carbon-containing film comprises Si, C, N, and H.

33. The method of claim 19 wherein the active oxygen species is the product of an oxygen plasma generated from a gas comprising an oxygen-containing gas selected from the group consisting of O₂, CO₂, NO₂, N₂O, H₂O, H₂O₂, and O₃; optionally, an inert gas selected from the group consisting of He, Ar, Ne, Kr, and Xe; and optionally, N₂.

34. The method of claim 33 wherein the gas further comprises NF₃.

35. The method of claim 33 comprising an inert gas.

Description:

FIELD OF THE INVENTION

[0001] This disclosure relates generally to cleaning a chemical vapor deposition (CPU) and more particularly, to cleaning carbon-containing deposits from a CVD with active oxygen species.

BACKGROUND OF THE INVENTION

[0002] In a conventional large scale integration (LSI) device—for example, a CPU, memory, or system LSI—the insulator between the metal circuit lines is silicon dioxide (SiH ₄ based SiO ₂ or TEOS based SiO ₂ ) or fluorinated silica glass. Reducing the resistance of the metal lines or the capacitance of the insulator between metal lines allows increased speed in a device. The resistance of the metal lines may be reduced by using copper as the conductor instead of an aluminum alloy. The capacitance of the insulator may be reduced by using a low-k film rather than SiO ₂ or related materials. The dielectric constant of SiO ₂ -based films is typically from about 3.8 to about 4.4. The dielectric constant of a low-k film is typically from about 2.0 to about 3.0. Through these methods, RC delay may be reduced, thereby allowing the fabrication of faster devices.

[0003] Several low-k materials have been developed. One type of low-k material is carbon-doped SiO ₂ . Such a film typically contains Si, O, C, and H. See, for example, U.S. Pat. Nos. 6,352,945 and 6,383,955.

[0004] When pure or fluorine-doped SiO ₂ is deposited on a semiconductor wafer in a chemical vapor deposition (CVD) reactor, some SiO ₂ is also deposited on interior surfaces of the CVD reactor. This contaminating material is typically removed by in-situ plasma discharge. A fluorine-containing gas is used as a cleaning gas, which is activated by a local plasma discharge within the CVD chamber. Examples of such cleaning gases include C ₂ F ₆ , CF ₄ , and C ₃ F ₈ , mixed with O ₂ .

[0005] The fluorocarbons used in the cleaning process are “greenhouse gases,” believe to contribute to the greenhouse effect, however. To reduce the use of greenhouse gases, NF ₃ been used as the cleaning gas in a remotely generated plasma. An argon gas carrier stabilizers the plasma discharge in a plasma chamber separate from the CVD reactor. This process is disclosed in U.S. Pat. No. 6,187,691 and U.S. application Ser. No. 2002/0011210A1.

[0006] Similarly, after the depositing a low-k film, a CVD reactor is typically contaminated with carbon, silicon, oxygen, and hydrogen containing residues. Fluorine-containing species derived from NF ₃ are introduced from a separate plasma chamber through a conduit into the CVD reactor, thus removing these contaminants. Although the activated species (e.g., fluorine radicals) react with the contaminants, carbon-containing contaminants react to form fluorocarbon compounds that remain in the CVD chamber. During low-k dielectric film deposition, these fluorocarbon compounds can volatilize and influence the film formation on the wafer.

[0007] This fluorocarbon contamination results in an undesirable process gas mixture, adversely influencing the deposition of the low-k layer by, for example, reducing deposition rates, producing non-uniform film thickness on individual wafers, or producing non-uniform film thickness within a lot of sequentially processed wafers. The film non-uniformity on a single wafer is expressed as a percentage, calculated as the difference between the maximum and minimum film thickness on the wafer, divided by the average film thickness of the wafer, divided by 2, and multiplied by 100. The film non-uniformity within a lot or batch of wafers is expressed as a percentage, calculated as the difference between the maximum and minimum film thickness in the lot, divided by the average film thickness of the lot, divided by 2, and multiplied by 100. Typically, the film non-uniformity of the first wafer is worse compared with the second wafer. For example, in one 25-wafer processing cycle, the deposition rate for the first wafer varied ±1.4% compared to the rate for subsequent wafers, and a single wafer film non-uniformity for the first wafer was ±(2.7%-3.5%).

[0008] These non-uniformities are undesirable because they affect the device k-value. Device k is the measured capacitance of an isolated dielectric between two parallel metal lines. The capacitance between two parallel conductors is the total cross sectional area between the conductors multiplied by the dielectric constant of the insulating film divided by the distance between the two conductors. For example, the capacitance between a pair of metal lines isolated by a single dielectric film is C=k _eff ε(A/d), where ε=8.85×10 ⁻¹² C ² /Nm ² , C is the measured capacitance, A is the total cross sectional area between the two lines (dielectric film thickness t times effective line length L _eff ), d is the distance between the metal circuit lines (the isolation width), and k _eff is the effective dielectric constant of the film. Hence, effective k can be calculated as k _eff =(C/ε) (d/A). Because capacitance C is dependent on the dielectric film thickness t, k _eff is also dependent on film thickness.

[0009] In both the fluorocarbon and NF ₃ plasma cleaning processes, the CVD reactor is cleaned by active fluorine species in an inert gas, for example argon. Both methods produce non-volatile fluorocarbon by-products, however, that may cause undesirable variations in the deposition process.

SUMMARY OF THE INVENTION

[0010] The present invention relates to a method of cleaning contaminants from the reaction chamber of a CVD reactor with active oxygen species produced, for example, from an oxygen plasma. The method is particularly suited to cleaning a PECVD (plasma-enhanced CVD) reactor, especially a PECVD reactor used to deposit dielectric films, including low-k films. The method disclosed herein is more particularly suited to cleaning a PECVD reactor used to deposit carbon-containing films, including carbon-doped silicon oxide, which contain Si, C, O, and H; silicon carbide films, which contain Si, C, and H; and SiCN films, which contain Si, C, N, and H. A PECVD reactor is typically a single or small batch substrate-processing apparatus used to use deposit a film onto a wafer.

[0011] The oxygen plasma cleaning process is preferably performed one hour or less before the first wafer of a lot is loaded into the CVD reactor. Twenty-five wafers are a typical lot. This application describes three embodiments that provide active oxygen species to the CVD reaction chamber for cleaning purposes:

[0012] (1) An in-situ oxygen plasma cleaning process, wherein an oxygen plasma is generated within the CVD reaction chamber;

[0013] (2) A downstream oxygen plasma cleaning process, wherein an oxygen plasma is generated in a plasma chamber separate from the CVD reaction chamber; and

[0014] (3) A downstream oxygen-fluorine plasma cleaning process, wherein a plasma that contains both active oxygen and fluorine species is generated in a plasma chamber separate from the CVD reaction chamber.

[0015] The time required for the cleaning cycle of the CVD reactor using the process disclosed herein depends on the conditions used in the deposition process. Typically, the material deposited, the longer the cleaning cycle. The length of the cleaning cycle may be readily ascertained by one skilled in the art without undue experimentation. After performing an oxygen plasma CVD cleaning step and before loading the first wafer, the reactor may be allowed to idle, for example under maximum vacuum or in stand-by mode, as detail below until the temperature of the wafer support structure has stabilized.

[0016] As discussed above, the thickness non-uniformity of the first wafer deposited by a CVD reactor is typically worse compared with the second wafer. For example, in one 25-wafer processing cycle, the deposition rate for the first wafer varied ±1.4% compared to rate for subsequent wafers, and the thickness non-uniformity was ±(2.7%-3.5%). After applying the oxygen plasma cleaning process disclosed herein, however, the deposition rate of the first wafer was less than 1% slower and the thickness non-uniformity was below ±2.5%.

BRIEF DESCRIPTION OF THE DRAWINGS

[0017] FIG. 1A illustrates a process for depositing a dielectric film on a semiconductor wafer in which the reaction chamber is pre-cleaned with an in-situ oxygen plasma cleaning process, in accordance with a preferred embodiment of the present invention.

[0018] FIG. 1B illustrates a process for depositing a dielectric film on a semiconductor wafer in which the reaction chamber is pre-cleaned with an NF ₃ -argon plasma and an in-situ oxygen plasma cleaning process, in accordance with a preferred embodiment of the present invention.

[0019] FIG. 2A illustrates a process for depositing a dielectric film on a semiconductor wafer in which the reaction chamber is pre-cleaned with a downstream oxygen plasma cleaning process, in accordance with a preferred embodiment of the present invention.

[0020] FIG. 2B illustrates a process for depositing a dielectric film on a semiconductor wafer in which the reaction chamber is pre-cleaned with an NF ₃ -argon plasma and a downstream oxygen plasma cleaning process, in accordance with a preferred embodiment of the present invention.

[0021] FIG. 3 illustrates a process for depositing a dielectric film on a semiconductor wafer in which the reaction chamber is pre-cleaned with a downstream oxygen-fluorine plasma cleaning process, in accordance with a preferred embodiment of the present invention.

[0022] FIG. 4 illustrates a process for depositing a dielectric film on a semiconductor wafer in which the reaction chamber is pre-cleaned with an in-situ oxygen plasma cleaning process, in accordance with a preferred embodiment of the present invention.

[0023] FIG. 5 is a cross section of a PECVD apparatus suitable for practicing the disclosed methods.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

[0024] As used herein, an oxygen plasma is a plasma comprising active oxygen species effective for cleaning a CVD chamber. A fluorine plasma comprises active fluorine species effective for cleaning a CVD chamber. A plasma that comprises both active oxygen species and active fluorine species is both an oxygen and a fluorine plasma. The active species, including ions and radicals, remove contaminants from the CVD reaction chamber through active species-assisted etching, including ion-assisted etching.

[0025] Oxygen-containing gases are those gases that produce active oxygen species when used to generate a plasma. Preferred oxygen-containing gases are O ₂ , CO ₂ , NO ₂ , N ₂ O, H ₂ O, H ₂ O ₂ , O ₃ , and mixtures of O ₂ and O ₃ . Fluorine-containing gases are those gases that produce active fluorine species when used to generate a plasma. Fluorine containing gases include fluorine, fluorocarbon gases, hydrofluorocarbon gases, and gaseous nitrogen fluorides. Preferred fluorocarbon gases are NF ₃ , CF ₄ , C ₂ F ₆ , and C ₃ F ₈ . A preferred hydrofluorocarbon gas is CHF ₃ . A preferred gaseous nitrogen fluoride is NF ₃ . Inert gases are He, Ar, Ne, Kr, and Xe.

[0026] Oxygen Plasma Generation

[0027] In an in-situ oxygen plasma cleaning process, an oxygen plasma is generated by an RF source through electrodes in a CVD chamber charged with an oxygen-containing gas, optionally mixed with an inert gas or nitrogen. Adding helium or argon enhances the stability of the plasma.

[0028] In order to generate a plasma discharge, a 27.12 MHz RF source is output through electrodes in the CVD chamber. Other frequencies may be used to generate the plasma discharge, for example 13.56 MHz, 430 kHz, 400 kHz, 380 kHz, 350 kHz, 300 kHz, and 2 MHz. Dual frequency RF sources are also useful for generating the plasma discharge, for example, 27.12 MHz+400 kHz and 13.56 MHz+430 kHz, where the two frequencies are mixed in a matching network. Selecting the RF frequency and power necessary to generate a satisfactory plasma is within the knowledge of the skilled artisan.

[0029] Typical conditions for the in-situ oxygen plasma cleaning process are: 1



O ₂	0.1-5.0	slm
He	0.1-10.0	slm
Reactor Pressure	10-1000	Pa
Processing Time	>20	sec
RF power	200-10,000	W

[0030] Preferred conditions are: 2



O ₂	0.5-3.0	slm
He	0.5-5.0	slm
Reactor Pressure	50-500	Pa
Processing Time	>60	sec
RF power	500-2000	W

[0031] Particularly preferred conditions are: 3



O ₂	1.0-2.0	slm
He	1.0-2.0	slm
Reactor Pressure	100-250	Pa
Processing Time	>120	sec
RF power	500-1000	W

[0032] In a downstream oxygen plasma cleaning process, an oxygen-containing gas is supplied to a plasma chamber separate from the CVD reactor where an oxygen plasma is generated. Remotely generating a plasma for CVD cleaning is described in U.S. Pat. No. 6,187,691 and U.S. application Ser. No. 2002/0011210A1, the disclosures of which are incorporated herein by reference. Briefly, energy, such as microwave or RF energy, is used to dissociate the oxygen-containing gas into active oxygen species. The active oxygen species are then introduced into the CVD reactor located downstream from the plasma chamber. The frequency of RF source ranges from about 400 kHz to about 2.45 GHz. The remote plasma chamber preferably employs a low-field toroidal plasma with a frequency of about 400 kHz. An inert gas or nitrogen may be added to the oxygen-containing gas. Adding helium or argon enhances the stability of the plasma.

[0033] Typical conditions for downstream oxygen plasma cleaning process are: 4



O ₂	0.1-5	slm
Ar	0.1-10	slm
Reactor Pressure	10-1350	Pa
Processing Time	>20	sec
RF power	200-10,000	W

[0034] Preferred conditions are: 5



O ₂	0.5-3.0	slm
Ar	0.5-5.0	slm
Reactor Pressure	50-500	Pa
Processing Time	>60	sec
RF power	1000-5000	W

[0035] Particularly preferred conditions are: 6



O ₂	1.0-2.0	slm
Ar	1.0-2.0	slm
Reactor Pressure	100-250	Pa
Processing Time	>120	sec
RF power	1000-3000	W

[0036] In a downstream oxygen-fluorine plasma cleaning process, an oxygen-containing gas and a fluorine containing gas are supplied to a plasma chamber separate from the CVD reactor. RF energy is used to dissociate the oxygen-containing gas and the fluorine containing gas into active oxygen species and active fluorine species, respectively. The active oxygen and fluorine species are then introduced into the CVD reactor located downstream from the plasma chamber. An inert gas or nitrogen may be added to the gas mixture. Adding helium or argon enhances the stability of the plasma. O ₂ increases the lifetime of the active fluorine species, probably by reduction of fluorine ion recombination. A gas mixture of NF ₃ , argon, and O ₂ is preferred in the downstream oxygen-fluorine plasma cleaning process.

[0037] Typical conditions for the downstream oxygen-fluorine plasma cleaning process are: 7



O ₂	0.1-3.0	slm
NF ₃	0.2-5.0	slm
Ar	0.2-10.0	slm
Reactor Pressure	10-1350	Pa
Processing Time	>20	sec
RF power	500-10,000	W

[0038] Preferred conditions are:

[0039] Particularly preferred conditions are: 8



O ₂	0.2-1.0	slm
NF ₃	0.5-3.0	slm
Ar	0.5-5.0	slm
Reactor Pressure	50-500	Pa
Processing Time	>60	sec
RF power	750-5000	W

[0040] 9



O ₂	0.3-0.5	slm
NF ₃	0.75-1.5	slm
Ar	1.0-4.0	slm
Reactor Pressure	100-250	Pa
Processing Time	>120	sec
RF power	2000-3000	W

[0041] In the downstream oxygen and oxygen-fluorine plasma cleaning processes, an initial plasma may be generated in the plasma chamber prior to the introduction of the cleaning gas, either an oxygen-containing gas, or a mixture of an oxygen-containing gas and a fluorine-containing gas. In one preferred embodiment, the initial plasma is generated from an inert gas. In a second preferred embodiment, the initial plasma is generated from O ₂ gas.

[0042] Oxygen Plasma Cleaning of CVD Reactors

[0043] The oxygen plasma CVD cleaning process disclosed herein is useful in both low-k film and SiC deposition processes. As used hereinafter, in “stand-by mode” the CVD chamber pressure is set to about 533.2 Pa and about 1 slpm N ₂ flow.

[0044] FIG. 1A illustrates one preferred embodiment of the dry plasma cleaning process. In step 110 , the CVD reactor is in standby mode. In step 120 , the CVD reactor is pre-cleaned by the in-situ oxygen plasma cleaning process. The first wafer is loaded into the CVD reactor in step 130 , the desired film deposited thereon in step 140 , and the wafer unloaded in step 150 . In step 160 , the CVD reactor is cleaned with a remotely generated NF ₃ -argon plasma. Steps 130 - 160 are repeated for the remaining wafers in the lot. After processing the last wafer, the CVD reactor is returned to standby mode in step 170 .

[0045] FIG. 1B illustrates a second preferred embodiment of the dry plasma cleaning process. In step 210 , the CVD reactor is in stand-by mode. In step 215 , the reactor is first cleaned with a remotely generated NF ₃ -argon plasma. In step 220 , the reactor is pre-cleaned by the in-situ oxygen plasma cleaning process. Steps 215 and 220 may be performed in either order. The first wafer is loaded into the CVD reactor in step 230 , the desired film deposited thereon in step 240 , and the wafer unloaded in step 250 . In step 260 , the CVD reactor is cleaned with a remotely generated NF ₃ -argon plasma. Steps 230 - 260 are repeated for the remaining wafers in the lot. After processing the last wafer, the CVD reactor is returned to standby mode in step 270 .

[0046] FIG. 2A illustrates a third preferred embodiment of the dry plasma cleaning process. In step 310 , the CVD reactor is in stand-by mode. In step 320 , the reactor is pre-cleaned by the downstream oxygen plasma cleaning process. The first wafer is loaded into the CVD reactor in step 330 , the desired film deposited thereon in step 340 , and the wafer unloaded in step 350 . In step 360 , the CVD reactor is cleaned with a remotely generated NF ₃ -argon plasma. Steps 330 - 360 are repeated for the remaining wafers in the lot. After processing the last wafer, the CVD reactor is returned to standby mode in step 370 .

[0047] FIG. 2B illustrates a fourth preferred embodiment of the dry plasma cleaning process. In step 410 , the CVD reactor is in stand-by mode. In step 415 , the CVD reactor is first cleaned with a remotely generated NF ₃ -argon plasma. In step 420 , the reactor is pre-cleaned by the downstream O ₂ plasma cleaning process. Steps 415 and 420 may be performed in either order. The first wafer is then loaded into the CVD reactor in step 430 , the desired film deposited in step 440 , and the wafer unloaded in step 450 . In step 460 , the CVD reactor is cleaned with a remotely generated NF ₃ -argon plasma. Steps 430 - 460 are repeated for the remaining wafers in the lot. After processing the last wafer, the CVD reactor is returned to standby mode in step 470 .

[0048] FIG. 3 illustrates a fifth preferred embodiment of the dry plasma cleaning process. In step 510 , the reactor is in stand-by mode. In step 520 , the reactor is cleaned by the downstream oxygen-fluorine plasma cleaning process. The first wafer is then loaded into the CVD reactor in step 530 , the desired film deposited in step 540 , and the wafer unloaded in step 550 . In step 560 , the CVD reactor is cleaned either with a remotely generated NF ₃ -argon plasma or by the downstream oxygen-fluorine plasma cleaning process. Steps 530 - 560 are repeated for the remaining wafers in the lot. After processing the last wafer, the CVD reactor is returned to standby mode in step 570 .

[0049] In yet another embodiment of the disclosed dry plasma cleaning process, a fluorine plasma cleaning of the CVD reaction chamber is not performed after the film deposition procedure for each wafer. Instead a fluorine plasma cleaning step is performed after film deposition on a predetermined number of wafers. The required frequency for the fluorine plasma cleaning step depends on the particular deposition conditions and its determination is within the scope of the skilled artisan without undue experimentation. Reducing the frequency of the fluorine plasma cleaning step improves the throughput of the CVD apparatus.

[0050] Each of the processes illustrated in FIGS. 1 - 3 may be modified in accordance with this embodiment. For example, a process analogous to that illustrated in FIG. 1A according to the present embodiment is illustrated in FIG. 4 . In step 610 , the CVD reactor is in standby mode. In step 620 , the CVD reactor is pre-cleaned by the in-situ oxygen plasma cleaning process. The first wafer is loaded into the CVD reactor in step 630 , the desired film deposited thereon in step 640 , and the wafer unloaded in step 650 . Steps 630 - 650 are repeated for a predetermined number of wafers. In step 660 , the CVD reactor is cleaned with a remotely generated NF ₃ -argon plasma. Steps 630 - 660 are repeated for the remaining wafers in the lot. After processing the last wafer, the CVD reactor is returned to standby mode in step 670 .

[0051] FIG. 5 illustrates a parallel-plate type plasma enhanced CVD apparatus in which the oxygen plasma cleaning process disclosed wherein may be performed. The cleaning process may be also be performed in other types of CVD apparatus, for example, a reduced pressure thermal CVD apparatus. The CVD apparatus shown in FIG. 5 is configured for providing a remotely generated plasma to the CVD processing chamber.

[0052] A procedure for depositing a film on a semiconductor wafer in the apparatus shown in FIG. 5 is performed as follows. After a stand-by period, one wafer 3 is placed within a transfer chamber 1 . The wafer 3 is loaded onto a wafer support structure, or susceptor, 5 within a processing chamber 4 adjacent to a conveying chamber 1 by an auto transfer robot 2 . The susceptor 5 also serves as an electrode equipped with a heater (heating element) 9 embedded therein. A reaction gas is evenly supplied onto the wafer 3 from a showerhead 6 , which is parallel to the susceptor 5 . Radio-frequency power is applied to the showerhead 6 by radio-frequency oscillators 7 and 7 ′. An RF matching system 12 is used between the radio-frequency oscillators 7 and 7 ′, and the processing chamber 4 .

EXAMPLE 1

Low Dielectric Constant Organo Silicon Glass Deposition Process

[0053] To deposit a SiCO film onto the silicon wafer 3 , a mixed gas of Si(OCH ₃ ) ₂ (CH ₃ ) ₂ and helium is supplied as the reaction gas from the showerhead 6 to the processing chamber 4 . The pressure within the processing chamber 4 is controlled and adjusted below about 1060 Pa using a conductance regulating valve 8 linked to the processing chamber 4 . The heater 9 heats the susceptor 5 on which the wafer 3 is loaded. The wafer 3 is then heated to about 350-400° C. upon being loaded onto the susceptor 5 . Radio-frequency power at 13.56 MHz, mixed power at 13.56 MHz and 430 MHz, power at 27.12 MHz, or mixed power at 27.12 MHz and 400 kHz is applied between the susceptor 5 and the showerhead 6 . The resulting plasma forms a thin film on the wafer 3 . After the thin film is formed, the wafer 3 is conveyed out of the processing chamber 4 by the auto transfer robot 2 .

[0054] In other embodiments, mixtures of tetramethylsilane, Si(CH ₃ ) ₄ , or trimethylsilane, SiH(CH ₃ ) ₃ , and an oxygen-containing gas, for example O ₂ , NO ₂ , CO ₂ , H ₂ O, O ₃ and mixtures thereof, may also be used as the reaction gas to deposit SiCO films.

[0055] In order to remove contaminants (SiCO compounds in this case) from the processing chamber 4 after the film deposition step, the oxygen plasma cleaning process disclosed herein is used. Plasma ignition of argon by radio-frequency power in a remote plasma discharge chamber 10 is followed by introducing a gas mixture of O ₂ and NF ₃ into remote the plasma discharge chamber 10 . After the gases are disassociated and activated, they are brought into the processing chamber 4 through a valve 11 , thereby cleaning the processing chamber 4 .

[0056] The film-deposition and cleaning processes are performed alternately for each lot of wafers.

[0057] Exemplary SiCO film deposition conditions are: 10



Si(OCH ₃ ) ₂ (CH ₃ ) ₂	140	sccm
Helium	50	sccm
RF power (27.12 MHz)	1500-1650	W
Pressure	560	Pa
Electrode gap	24	mm
Substrate temperature	370-380°	C.

[0058] Exemplary downstream fluorine plasma cleaning conditions are: 11



	NF ₃	1 slm
	Argon	5 slm
	RF power (400 kHz)	2.1-2.8 kW

EXAMPLE 2

Silicon Carbide (SiC) Deposition Process

[0059] Silicon carbide (SiC) films are used as hardmasks, as etch stop films for dual damascene dry etch processes, or as Cu diffusion barrier films. In depositing SiC, tetramethylsilane, Si(CH ₃ ) ₄ , is supplied to the CVD reactor instead of the Si(OCH ₃ ) ₂ (CH ₃ ) ₂ used in SiCO film deposition. Referring to FIG. 5, a mixed gas of tetramethylsilane and helium is supplied as the reaction gas from the showerhead 6 to the processing chamber 4 . The pressure in the processing chamber 4 is adjusted below about 1060 Pa using the conductance regulating valve 8 . The heater 9 heats the susceptor 5 on which a wafer 3 is loaded. The wafer 3 is heated to about 300-380° C. upon being loaded onto the susceptor 5 . Radio-frequency power at 13.56 MHz, mixed power at 13.56 MHz and 430 MHz, power at 27.12 MHz, or mixed power at 27.12 MHz and 400 kHz is applied between the susceptor 5 and the showerhead 6 . The resulting plasma deposits a thin film of SiC onto the wafer 3 . After the thin film is formed, the wafer 3 is conveyed out of the processing chamber 4 by the auto transfer robot 2 . In other embodiments, trimethylsilane (SiH(CH ₃ ) ₃ ) may also be used to deposit SiC films. An oxygen poor SiCO film may also be used in place of a SiC film, and may be deposited by adding an oxygen-containing gas such as O ₂ , NO ₂ , CO ₂ , O ₃ , or mixtures thereof to the reaction gas mixture. CO ₂ is a preferred oxygen-containing gas for depositing such SiCO films.

[0060] Exemplary SiC film deposition conditions are: 12



	Tetramethylsilane	200-700 sccm
	Helium	500-5000 sccm
	RF power (27.12 MHz)	300-1000 W
	RF power (400 kHz)	100-300 W
	Pressure	300-700 Pa
	Electrode gap	24 mm
	Substrate temperature	320-380° C.

[0061] Exemplary downstream oxygen-fluorine plasma cleaning conditions are: 13



NF ₃	0.5-1 slm
Argon	2-5 slm
O ₂	0.1-1.0 slm
RF power (400 kHz)	2.0-2.8 kW

[0062] SiCN films may be used in place of silicon carbide films. An SiCN film may be deposited by adding a nitrogen-containing gas, for example NH3, to the deposition gas mixture.

EXAMPLE 3

Pre-process Cleaning

[0063] The following three plasma dry cleaning sequences are used for both low-k film and SiC pre-process cleaning.

[0064] Referring to FIG. 5 , in the in-situ oxygen plasma cleaning method, O ₂ and He enter the CVD reactor through a gas line 13 . The pressure in the reactor is controlled by the conductance control valve 8 . When the pressure in the reactor reaches a set point, RF power is turned on. RF power at 27 MHz dissociates the O ₂ gas into reactive species. Reactive oxygen species with sufficient ion-bombardment energy will react with fluorine and carbon compounds deposited on the walls of reaction chamber 4 and the susceptor 5 . The process converts non-volatile compounds into volatile compounds, which are then pumped out through the gate valve 8 . After a pre-set “plasma on” time, the RF power, and the O ₂ and He gases are automatically turned off. The conductance control valve 8 is opened fully to allow complete pump down of the entire reactor to remove the by-products.

[0065] In the downstream oxygen plasma cleaning process, an inert gas such as argon is introduced into the remote plasma chamber 10 via the gas-line 14 . The valve 11 is opened at the same time. When the gas pressure reaches a set point in the plasma chamber 10 , power to the remote plasma unit 10 is turned on. A pre-mixed gas mixture of an oxygen-containing gas and an inert gas, for example O ₂ and argon, is introduced into the plasma chamber 10 through the gas line 14 . The O ₂ dissociates in the plasma chamber 10 . The reactive cleaning species enter the CVD chamber through the valve 11 . Reactive cleaning species with sufficient energy will remove fluorine and carbon compounds deposited on the walls of the reactor chamber 4 and the susceptor 5 by active species (e.g., radical) assisted etching. This process converts these non-volatile compounds into volatile by-products, which are pumped out through the gate valve 8 . After a pre-set “plasma on” time, the remote plasma unit 10 automatically turns off, followed by the flow of both the pre-mixed gas and the argon. The conductance control valve 8 is opened fully to allow the complete pump-down of the entire reactor to remove the by-products.

[0066] In the downstream oxygen-fluorine plasma cleaning process, a pre-mixed oxygen-containing gas, for example O ₂ mixed with argon, is introduced into the remote plasma chamber 10 through the gas-line 14 . The valve 11 is opened at the same time. When the gas pressure reaches a set point in the plasma chamber 10 , power to the remote plasma unit 10 is turned on. Next, a fluorine-containing gas, for example NF ₃ , is introduced into the plasma chamber 10 through the gas line 14 . The gases dissociate in the plasma chamber 10 . The reactive cleaning species enter the CVD plasma processing chamber 4 though the valve 11 . The O ₂ increases fluorine reactive species concentration by reducing fluorine ion recombination. The resulting plasma includes both reactive oxygen species and reactive fluorine species. Reactive cleaning species with sufficient energy will remove fluorine and carbon compounds deposited on the walls of the processing chamber 4 and the susceptor 5 by active species (e.g., radical) assisted etching. This process converts these non-volatile compounds into volatile by-products, which are pumped out through the gate valve 8 . After a pre-set “plasma on” time, the remote plasma unit 10 automatically turns off, followed by the flow of the gas sources. The conductance control valve 8 is opened fully to allow the complete pump-down of the entire reactor to remove the by-products.

[0067] The embodiments illustrated and described above are provided as examples of certain preferred embodiments of the present invention. Various changes and modifications can be made to the embodiments presented herein by those skilled in the art without departure from the spirit and scope of this invention, the scope of which is limited only the claims appended hereto.

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